Monochromator for Aberration-Corrected STEM
نویسندگان
چکیده
منابع مشابه
Monochromator for Aberration-Corrected STEM
In a scanning transmission electron microscope (STEM), the elemental analysis at atomic resolution is realized by the combination with electron energy-loss spectroscopy (EELS), since an aberration corrected probe forming lens system enables us to obtain an electron probe sized about 0.1 nm [1]. In EELS, the energy resolution is mainly limited by the energy spread of the electron source, which i...
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Supplementary data 367.1903.3683.DC1.html http://rsta.royalsocietypublishing.org/content/suppl/2009/08/11/ "Audio Supplement" References l.html#ref-list-1 http://rsta.royalsocietypublishing.org/content/367/1903/3683.ful This article cites 33 articles, 3 of which can be accessed free Rapid response 1903/3683 http://rsta.royalsocietypublishing.org/letters/submit/roypta;367/ Respond to this articl...
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INTRODUCTION AS VLSI (very large scale integration) technology evolves toward ever smaller features and multilayer designs, analysis and control of structures and compositions at the atomic level is becoming increasingly important. In 1998 Hitachi HighTechnologies Corporation released the HD-2000, a STEM (scanning transmission electron microscope) that was very well received for combining the e...
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An all-magnetic monochromator/spectrometer system for sub-30 meV energy-resolution electron energy-loss spectroscopy in the scanning transmission electron microscope is described. It will link the energy being selected by the monochromator to the energy being analysed by the spectrometer, without resorting to decelerating the electron beam. This will allow it to attain spectral energy stability...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2014
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927614004759